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Ecological Systems and Devices

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ANALYSIS OF THE FILTERING SYSTEM CLEAN ROOMS HIGH-TECH INDUSTRIES
V.A. Gavrilin, A.S. Ryabyshenkov, Thein Htut Oo, Phyo Thu

The multistage filtering system for clean rooms is a complex technical system consisting of various elements (start filters, finishing filters, etc.). The analysis of the efficiency of the entire system as a whole and of each element separately according to the criterion of achieving the final value of pressure drop is carried out Recommendations for replacing filters to improve the efficiency of the entire system. A comparative analysis of the effectiveness of the filtration system at different frequency of replacement filters.
Keywords: filtration system; differential pressure; contamination of filters; efficiency; clean rooms.


DOI: 10.25791/esip.05.2019.627

Contacts: E-mail: ryabyshenkov@mail.ru

Pp. 44-48.

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