Ecological Systems and Devices Annotation << Back ANALYSIS OF THE INFLUENCE OF ATMOSPHERIC AIR PARAMETERS ON THE EFFICIENCY OF AIR CONDITIONING AND AIR FILTRATION OF CLEANROOMS Thein Htut Oo, Phyo Thu, A.N. Zakharov, V.A. Gavrilin Reducing the topological dimensions of the elements of microelectronic products presents ever more stringent requirements to the parameters of the internal production environment in clean rooms, which is achieved through the effective functioning of the air conditioning and air fi ltration system. Proceeding from this, the main point of the presented work is the analysis of the recirculation system (RS) of the air conditioning and air fi ltration system (ACFS) of clean rooms (CR) of microelectronics. The parameters of the internal production environment of the state of emergency depend on the effective functioning of ACFS in WPY and CPY. In this article, a detailed analysis of the scheme of the multi-stage air conditioning and air fi ltration system in the CR. The analysis of the infl uence of climatic parameters of the outside air of the Zelenograd SNTG on the ACFS of the CR is carried out. A mathematical model of the state of CR of class 5 ISO using the MATLAB is constructed and its structural scheme is developed, which allows to maintain the air temperature at the level of 20±0,5 °С. The results of computer modeling confi rm the operability of the constructed scheme and its suitability for practical application in the state of CR of microelectronics, and it is possible to correct the initial data and eliminate possible defi ciencies by upgrading the circuit in accordance with the specified conditions. Keywords: clean rooms; efficiency ACFS; air conditioning and air filtration system; recirculation system; mathematical modeling. Contacts: E-mail: theinhtutoo143@gmail.com Pp. 03-13.