Ecological Systems and Devices Annotation << Back PROVIDING OF TEMPERATUREHUMIDITY CHARACTERISTICS IN CLEANROOMS OF MICROELECTRONICS Thein Htut Oo, A.S. Ryabyshenkov The air conditioning system plays an important role in maintaining the indoor air parameters (temperature, humidity, etc.) in a cleanroom of microelectronics. The purpose of the presented work is to study the processes of heat and humidity characteristics in the cleanroom. In carrying out the work, the following tasks were solved: analysis of the theory of heat-moisture exchange processes in the state of the cleanroom; selection a model for airflow simulation in the SOLIDWORKS program. At the following initial and boundary conditions: geometric dimensions of the cleanroom ISO 5 (8×6×3) m, technological process – lithography, at air temperature (21,5; 22; 22,5) °C and its humidity (35; 40 ; 45) %, 6 units of process equipment and 4 operators. 3D-model of the cleanroom of ISO 5 in the SOLIDWORKS program is constructed and its structural scheme is simulated for specifi ed air parameters. The results of computer simulation show the actual distribution of air temperature and humidity in the cleanroom of ISO 5. Keywords: clean rooms; cleanroom cleanliness; air conditioning and air fi ltration system; shame of multi-zone of air conditioning and air fi ltration system; computer modeling. DOI: 10.25791/esip.06.2018.025 Contacts: E-mail: theinhtutoo143@gmail.com Pp. 28-37.