Ecological Systems and Devices Annotation << Back ANALYSIS OF THE AIR CONDITIONING AND FILTRATION CLEAN ROOMS OF MICROELECTRONICS Phyo Thu, A.S. Ryabyshenkov The development trend of microelectronics is directly related to the decrease in the topological dimensions of the elements of the IET. In this regard, the requirements for the clean air environment are tightened and, as a result, the requirements for the air conditioning and fi ltration are increasing, in terms of the effi ciency of air purifi cation. The air conditioning and filtration systems of clean rooms of microelectronics are designed to maintain a specifi ed class of purity in them. The purpose of this work is to analyze the effi ciency of air purifi cation in the main elements of the system. To increase the effi ciency of the air conditioning and fi ltration systems, it is necessary to solve the following tasks: to analyze the effectiveness of the multistage air fi ltration system; determine the particle concentrations and the recovery time, depending on the multiplicity of the air exchange. Keywords: clean room; cleaning efficiency; air conditioning and fi ltration system. DOI: 10.25791/esip.09.2018.162 Contacts: E-mail: p.thu53@gmail.com Pp. 22-28.